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Feature-scale Simulations of Particulate Slurry Flows in Chemical Mechanical Polishing by Smoothed Particle Hydrodynamics
Chemical mechanical polishing smoothed particle hydrodynamics particulate flow rough pad wafer defects abrasive concentration
2014/10/10
In this paper, the mechanisms of material removal in chemical mechanical polishing (CMP) processes are investigated in detail by the smoothed particle hydrodynamics (SPH) method. The feature-scale beh...
Professor Anthony T Patera,The Department of Mechanical Engineering at Massachusetts Institute of Technology（图）
Professor Anthony T Patera The Department of Mechanical Engineering at Massachusetts Institute of Technology Applied Mathematics
2014/2/25
Anthony T Patera,Ford Professor of Engineering,Professor of Mechanical Engineering,Education:Ph.D. in Applied Mathematics, Massachusetts Institute of Technology, Cambridge, MA, February 1982;S.M. in M...
Representation of Hamiltonian formalism in dissipative mechanical system
Classical mechanics Lagrangian function Hamiltonian function
2010/9/21
Hamiltonian mechanics is the root of classical mechanics. Hamiltonian function is the modified version of Lagrangian function which is of the first order differential equations with generalized coordi...
A new type of knot energy is presented via real life experiments involving a thin resilient metallic tube. Knotted in different ways, the device mechanically acquires a uniquely determined (up to iso...
Mechanical Lagrangian systems with external forces
mechanical systems semisprays external forces stability
2009/2/26
We consider mechanical Lagrangian systems with external
forces that depend also on velocity. The geometrical model is given by
a special semispray S. We show that when the system is dissipative the
...
Mechanical Lagrangian systems with external forces
mechanical systems semisprays external forces stability
2009/1/7
We consider mechanical Lagrangian systems with external
forces that depend also on velocity. The geometrical model is given by
a special semispray S. We show that when the system is dissipative the
...