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Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization
Compositions Zr-Cu Binary Sputtered Film Characterization
2009/9/2
Zr-Cu amorphous films were prepared by radio-frequency (RF) magnetron sputtering on glass substrate using two kinds of the elemental composite targets: Cu chips on Zr plate and Zr chips on Cu plate. I...