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Study of Multilayer Coatings of Ti/TiN/TiC Produced by Pulsed Arc Discharge
Multilayer Coatings of Ti/TiN/TiC Pulsed Arc Discharge
2010/10/27
This work presents a study of multilayered Ti/TiN/TiC thin films obtained using a PAPVD (Plasma Assisted Physical Vapor Deposition) system by pulsed-arc discharge. For this purpose, a titanium target ...